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The '''cascaded arc''' is a wall-stabilized thermal [[electric arc]] discharge that produces a high density, low temperature [[plasma (physics)|plasma]]. | |||
[[File:Cascaded Arc Plasma Source.jpg|thumbnail|right|Cascaded Arc Plasma Source]] | |||
== General == | |||
The cascaded arc source, developed at the [[Eindhoven University of Technology]],<ref>[http://alexandria.tue.nl/repository/freearticles/588632.pdf] G.M.W. Kroesen, D.C. Schram, and J.C.M. de Haas, Plasma Chemistry and Plasma Processing, 10(4):531–551, 1990.</ref><ref>[https://crppwww.epfl.ch/LTPD99/pdf/invited/vandeSanden.pdf] M.C.M. van de Sanden, G.J.H. Brussaard, W.M.M. Kessels, A. de Graaf, M.F.A.M. van Hest, K.G.Y. Letourneur and D.C. Schram</ref> is shown in the figure below. Compared to plasma sources in other linear plasma generators, this source can produce high-density argon and hydrogen plasmas (respectively <math> 10^{21} -10^{24}</math>m<math>^{-3}</math> and <math>10^{19}-10^{22}</math> m<math>^{-3}</math>) at a relatively low [[electron temperature]] (~1 eV). Due to the high collision frequency of the particles in the source, the plasma is in thermal equilibrium and reasonably homogeneous. | |||
The cascaded arc consists of a gas inlet, three [[tungsten]] cathodes, cascaded plates, a nozzle and an anode. Via the gas inlet, the working gas -argon or hydrogen- can flow into the cathode chamber. The source is typically running at 0.5 - 3.0 slm (1 [[Standard Liter Per Minute]] = 4.4 · <math> 10^{20}</math> particles per second) and a discharge current of 100-300 A. The cascaded plates in between the cathode and anode are electrically insulated from each other by 1 mm thick [[Boron nitride]] plates. The [[voltage]] of these plates is the floating potential. Both nozzle and anode are grounded. | |||
== See also == | |||
*[[plasma source]] | |||
*[[List of plasma (physics) articles]] | |||
*[[Plasma window]] | |||
== External links == | |||
* [http://www.yale.edu/pollard_lab/pdf/86.pdf A Glow Discharge Unit] | |||
* [http://accelconf.web.cern.ch/accelconf/IPAC10/papers/thpec072.pdf HIGH BRIGHTNESS H- SURFACE PLASMA SOURCES] | |||
* [http://hal.archives-ouvertes.fr/docs/00/24/60/18/PDF/ajp-rphysap_1988_23_12_1889_0.pdf H- production in pure hydrogen discharges of surface-plasma sources] | |||
== References == | |||
<references/> | |||
[[Category:Plasma physics]] | |||
[[Category:Electric arcs]] |
Latest revision as of 12:53, 9 November 2012
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The cascaded arc is a wall-stabilized thermal electric arc discharge that produces a high density, low temperature plasma.
General
The cascaded arc source, developed at the Eindhoven University of Technology,[1][2] is shown in the figure below. Compared to plasma sources in other linear plasma generators, this source can produce high-density argon and hydrogen plasmas (respectively m and m) at a relatively low electron temperature (~1 eV). Due to the high collision frequency of the particles in the source, the plasma is in thermal equilibrium and reasonably homogeneous.
The cascaded arc consists of a gas inlet, three tungsten cathodes, cascaded plates, a nozzle and an anode. Via the gas inlet, the working gas -argon or hydrogen- can flow into the cathode chamber. The source is typically running at 0.5 - 3.0 slm (1 Standard Liter Per Minute = 4.4 · particles per second) and a discharge current of 100-300 A. The cascaded plates in between the cathode and anode are electrically insulated from each other by 1 mm thick Boron nitride plates. The voltage of these plates is the floating potential. Both nozzle and anode are grounded.
See also
External links
- A Glow Discharge Unit
- HIGH BRIGHTNESS H- SURFACE PLASMA SOURCES
- H- production in pure hydrogen discharges of surface-plasma sources